Cost-effective roughness and contour one time measurement solution.
Adopt high rigidity, high accuracy, maintenance-free linear motion guide rail, can control the measuring system with high precision performance.
Application Case
Technical Specification
| Model |
Infex 10 |
| Column |
Measuring range |
0-620mm optional |
| Drive unit |
Measuring range |
0-220mm optional |
| Indicating accuracy |
±(0.8+2L/100)μm |
| Straightness |
≤0.3μm/100mm |
| Detector |
Measuring range |
±10mm |
| Z1 axis contour indicating accuracy |
≤±(0.8+|0.12H|)μm |
| Z1 axis roughness indicating accuracy |
≤±(8nm+3.5%) |
| Repeatability |
1δ≤2nm |
| Residual noise |
≤0.012μm |
| Stylus |
Standard,diamond 5μm/90° |
| Measuring accuracy |
Arc |
≤±(1.2+R/12)μm |
| Arc Pt |
≤±0.3μm |
| Angle |
≤±1′ |
