|Measuring way||Vertical measuring|
|Motion axis||Z axis||255mm|
|Accuracy||Detector linear accuracy||±（3μm+|0.15H|）μm|
|Motion speed||Z axis||4 gear can be customized|
|Measuring function||Contour||Oversize workpiece surface line features, point features, distance between points,
distance between lines.
Position accuracy of features, including distance,
parallelism, verticality, angle, groove depth, groove width, radius.
Can perform analysis for straightness, convexity and contour.