Features: Dual-axis grating counting technology, multi-element evaluation.
Can measure the cylindricity, perpendicularity, coaxiality and other parameters of the ring and rolling element.
Application:


Technical Specification:
| Model No. |
CBS4100 |
CBS4200 |
| Turntable unit |
Bearing type |
Air-floating |
| Rotary accuracy[1] |
(0.025+6H/10000) μm |
| Rotary speed |
6 rpm |
4 / 6 / 8 /10 rpm |
| Table effective diameter |
180 mm |
| Max. workpiece diameter |
420 mm |
560 mm |
| Max. measuring diameter |
250 mm |
280 mm |
| Max. table load-bearing |
25 kg |
| Vertical axis (Z axis) |
Vertical motion range |
320 mm |
| Vertical motion drive way |
by electric |
| Column straightness[2] |
≤0.5 μm / 100 mm |
≤0.3 μm / 100 mm |
| Max. measuring depth |
100 mm (Min. inner diameter 30 mm) |
| Horizontal arm (R axis) |
Horizontal motion range |
165mm |
| Excess range |
25mm |
| Horizontal motion drive way |
by electric |
| Detector |
Acquisition device |
circular grating |
| Sampling points number in circle |
8192 points |
14400 points |
| Detector type |
Inductive detector |
| Detector measuring range |
± 300 μm |
| Detector resolution |
Max. 0.001 μm |
| R axis |
High precision grating detector (resolution 0.5μm) |
| Z axis |
High precision grating detector (resolution 0.5μm) |
[1]: (H: the height from table)
[2]: (λc is 2.5mm, optical flat sampling speed≤0.3mm/s.)