FDR SeriesContour Roughness Measuring Instrument_Contour Roughness Instrument_Standard Series

Roughness contour composited measuring instrument

Contour Roughness Measuring InstrumentFDR Series

Built on an innovative independent dual detectors design, ensuring each detector can perform unique advantages through precise coordination and optimized configuration, promoting complementarity performance between detectors, and bringing users a best experience.

The ingenious mechanical structure design makes it simple and convenient for contour detector and roughness detector changes.

Technical SpecificationPRODUCT PARAMETERS

Model		FDR 3600	FDR 5800	FDR 6220
Measure Range	X-axis	150 mm	180 mm	220 mm
	Z-axis	420 mm	420 mm	620 mm
	Z1-axis	Contour 30 mm	Contour 50 mm	Contour 60 mm
	Z1-axis	Roughness ±620 μm	Roughness ±620 μm	Roughness ±620 μm
Resolution	X-axis	1.2nm	1.2nm	1.2nm
	Z1-axis	1.2nm	1.2nm	1.2nm
	Z1-axis	262144:1	262144:1	262144:1
Coutour Accuracy	Z1-axis linearity accuracy	≤±(0.5+\|0.02H\|) um	≤±(0.5+\|0.02H\|) um	≤±(0.5+\|0.02H\|) um
	Arc	≤±(1+R/12) μm	≤±(1+R/12) μm	≤±(1+R/12) μm
	Arc Pt	≤0.3 um	≤0.3 um	≤0.3 um
	Angle	±1′	±1′	±1′
	Straightness	≤0.3 um / 100 mm (cut-off 0.8)	≤0.3 um / 100 mm (cut-off 0.8)	≤0.3 um / 100 mm (cut-off 0.8)
Roughness accuracy	Indicating accuracy	≤±(5 nm+2.5%)	≤±(5 nm+2.5%)	≤±(5 nm+2.5%)
	Residual noise	≤0.005 μm	≤0.005 μm	≤0.005 μm
	Repeatability	1δ≤1 nm	1δ≤1 nm	1δ≤1 nm
	Cut-off	0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8mm	0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8mm	0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8mm
	Evaluation length	λc x 2 / 3 / 4 / 5 / 6 / 7	λc x 2 / 3 / 4 / 5 / 6 / 7	λc x 2 / 3 / 4 / 5 / 6 / 7
Motion Control	X-axis drive way	By electric	By electric	By electric
	Z-axis drive way	By electric	By electric	By electric
	Contour measure speed	0.1-2 mm/s	0.1-2 mm/s	0.1-2 mm/s
	Roughness measure speed	0.05-0.5 mm/s	0.05-0.5 mm/s	0.05-0.5 mm/s
Granite table	500x800 mm

FDR Series

Contour Roughness Measuring Instrument

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