Using precision guide rails as measurement datum, higher accuracy performance, more widely applications.
Easily handle workpiece measurement with inclined and arc surface features.
Roughness Measuring InstrumentFR Series
Technical SpecificationPRODUCT PARAMETERS
| Model | FR 1240 | FR 1540 | |
| Measure Range | X-axis | 120 mm | 150 mm |
| Z-axis | 420 mm | 620 mm | |
| Z1-axis | ±420 μm | ±420 μm | |
| Resolution | Z1-axis | 65536:1 | 65536:1 |
| Roughness accuracy | Indicating accuracy | ≤±(10 nm+3.5%) | ≤±(10 nm+3.5%) |
| Residual noise | ≤0.01 μm | ≤0.01 μm | |
| Repeatability | 1δ≤2 nm | 1δ≤2 nm | |
| Cut-off | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | ||
| Evaluation length | λc x 2 / 3 / 4 / 5 / 6 / 7 | ||
| Motion Control | X-axis drive way | By electric | |
| Z-axis drive way | By electric | ||
| Measure speed | 0.05-0.5mm/s | ||
