One measurement for full surface metrology parameters evaluation by one integrated detector, simplifies the operation process, improves measurement efficiency, ensures accuracy and consistency in results.
Precision Integrated Contour Roughness Measuring InstrumentCQI Series
Technical SpecificationPRODUCT PARAMETERS
| Model | CQI 1520 | CQI 1820 | CQI 2220 | |
| Measure Range | X-axis | 150 mm | 180 mm | 220 mm |
| Z-axis | 420 mm | 420 mm | 620 mm | |
| Z1-axis | 20 mm (±10 mm) | 20 mm (±10 mm) | 20 mm (±10 mm) | |
| Resolution | Z1-axis (Detector Unit) | 0.02 μm | 0.02 μm | 0.02 μm |
| Coutour Accuracy | Z1-axis linearity accuracy | ≤±(0.6+|0.02H|) um | ≤±(0.6+|0.02H|) um | ≤±(0.6+|0.02H|) um |
| Arc | ≤±(1.5+R/12) μm | ≤±(1.5+R/12) μm | ≤±(1.5+R/12) μm | |
| Angle | ±1′ | ±1′ | ±1′ | |
| Straightness | ≤0.5 um / 100 mm (cut-off 0.8) | ≤0.5 um / 100 mm (cut-off 0.8) | ≤0.5 um / 100 mm (cut-off 0.8) | |
| Roughness accuracy | Indicating accuracy | ≤±(10 nm+3.5%) | ≤±(10 nm+3.5%) | ≤±(10 nm+3.5%) |
| Residual noise | ≤0.01 μm | ≤0.01 μm | ≤0.01 μm | |
| Repeatability | 1δ≤1.5 nm | 1δ≤1.5 nm | 1δ≤1.5 nm | |
| Cut-off | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | |
| Evaluation length | λc x 2 / 3 / 4 / 5 / 6 / 7 | λc x 2 / 3 / 4 / 5 / 6 / 7 | λc x 2 / 3 / 4 / 5 / 6 / 7 | |
| Motion Control | X-axis drive way | By electric | By electric | By electric |
| Z-axis drive way | By electric | By electric | By electric | |
| Contour measure speed | 0.1-2mm/s | 0.1-2mm/s | 0.1-2mm/s | |
| Roughness measure speed | 0.05-0.5mm/s | 0.05-0.5mm/s | 0.05-0.5mm/s | |
| Granite table | 500x800 mm | |||
Applications
Measurement case
