Independent dual detectors, maximize performance to full potential.
Built on an innovative independent dual detectors design, ensuring each detector can perform unique advantages through precise coordination and optimized configuration, promoting complementarity performance between detectors, and bringing users a best experience.
The ingenious mechanical structure design makes it simple and convenient for contour detector and roughness detector changes.
| Model | CFR 1540F | CFR 2640F | |
| Measure Range | X-axis | 180 mm | 220 mm |
| Z-axis | 420 mm | 620 mm | |
| Z1-axis | Contour 50 mm | Contour 60 mm | |
| Roughness ±420 μm | Roughness ±420 μm | ||
| Resolution | X-axis | 0.1 μm | 0.1 μm |
| Z1-axis | 0.02 μm | 0.02 μm | |
| Z1-axis | 65536:1 | 65536:1 | |
| Coutour Accuracy | Z1-axis linearity accuracy | ≤±(0.8+|0.05H|) um | ≤±(0.8+|0.05H|) um |
| Arc | ≤±(2+R/8) μm | ≤±(2+R/8) μm | |
| Angle | ±2′ | ±2′ | |
| Straightness | ≤0.5 um / 100 mm (cut-off 2.5) | ≤0.5 um / 100 mm (cut-off 2.5) | |
| Roughness accuracy | Indicating accuracy | ≤±(10 nm+3.5%) | ≤±(10 nm+3.5%) |
| Residual noise | ≤0.01 μm | ≤0.01 μm | |
| Repeatability | 1δ≤2 nm | 1δ≤2 nm | |
| Cut-off | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8mm | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8mm | |
| Evaluation length | λc x 2 / 3 / 4 / 5 / 6 / 7 | λc x 2 / 3 / 4 / 5 / 6 / 7 | |
| Motion Control | X-axis drive way | By electric | By electric |
| Z-axis drive way | By electric | By electric | |
| Contour measure speed | 0.1-2mm/s | 0.1-2mm/s | |
| Roughness measure speed | 0.05-0.5mm/s | 0.05-0.5mm/s | |
Precision Measurement Solution Provider
Understand customer and industry requirements,
provide custom tailored measurement solutions.
Email:ethan@walechina.com
Add:No.29 Shanglinyuan 3rd Road,Hi-tech Zone,Xi'an,China,710075
Tel：+86 158 2903 5092
