One measurement for full surface metrology parameters evaluation, simplifies the operation process, improves measurement efficiency, ensures accuracy and consistency in results.
High Precision Integrated Contour Roughness Measuring InstrumentFDI Series
Technical SpecificationPRODUCT PARAMETERS
| Series | FDI 1540F | FDI 1840F | FDI 2260F | |
| Measure Range | X-axis | 150 mm | 180 mm | 220 mm |
| Z-axis | 420 mm | 420 mm | 620 mm | |
| Z1-axis | 20 mm (±10 mm) | 20 mm (±10 mm) | 20 mm (±10 mm) | |
| Resolution | Z1-axis (Detector Unit) | 1.2nm | 1.2nm | 1.2nm |
| Coutour Accuracy | Z1-axis linearity accuracy | ≤±(0.5+|0.02H|) um | ≤±(0.5+|0.02H|) um | ≤±(0.5+|0.02H|) um |
| Arc | ≤±(1+R/12) μm | ≤±(1+R/12) μm | ≤±(1+R/12) μm | |
| Arc Pt | ≤0.3 μm | ≤0.3 μm | ≤0.3 μm | |
| Angle | ±1′ | ±1′ | ±1′ | |
| Straightness | ≤0.3 um / 100 mm (cut-off 0.8) | ≤0.3 um / 100 mm (cut-off 0.8) | ≤0.3 um / 100 mm (cut-off 0.8) | |
| Roughness accuracy | Indicating accuracy | ≤±(6 nm+2.5%) | ≤±(6 nm+2.5%) | ≤±(6 nm+2.5%) |
| Residual noise | ≤0.006 μm | ≤0.006 μm | ≤0.006 μm | |
| Repeatability | 1δ≤1 nm | 1δ≤1 nm | 1δ≤1 nm | |
| Cut-off | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | 0.025 / 0.08 / 0.25 / 0.8 / 2.5 / 8 mm | |
| Evaluation length | λc x 2 / 3 / 4 / 5 / 6 / 7 | λc x 2 / 3 / 4 / 5 / 6 / 7 | λc x 2 / 3 / 4 / 5 / 6 / 7 | |
| Motion Control | X-axis drive way | By electric | By electric | By electric |
| Z-axis drive way | By electric | By electric | By electric | |
| Contour measure speed | 0.1-2mm/s | 0.1-2mm/s | 0.1-2mm/s | |
| Roughness measure speed | 0.05-0.5mm/s | 0.05-0.5mm/s | 0.05-0.5mm/s | |
| Granite table | 500x800 mm | |||
Applications
Measurement case
